Shanghai Jiepu Technology's automatic film thickness measuring instrument can be paired with a two-axis motion platform, with a range of X120mm and Y120mm, for thickness measurement of the objects under test.

It is equipped with an imported xenon lamp with a spectral range of 200-2500nm, which can be used continuously for 5 years and has a stability of over 99.99%. The measurement system conducts non-destructive, rapid and high-precision measurement on samples and can be applied to thickness measurement in various industries such as thin films.

Film thickness measurement system

The samples can be measured non-destructively, rapidly and with high precision. It can be used for measuring parameters such as reflectance, transmittance and film thickness. It is widely applied in measurement

solutions for thickness in optical coating, semiconductor thin films, liquid crystal display, thin film layers and biomedicine, etc.

1、Optional two-axis motion platform, X1000mm, Y1000mm, with a precision of 2um.

2、 The light source is composed of a flashing xenon lamp, and the spectral detector is imported from Hamamatsu, Japan, featuring high precision and low noise. It has 2048 optical channels, enabling more precise optical measurement.

3、It can be mapped and imaged to draw the overall thickness curve of the entire film.

4、The software is equipped with a powerful measurement analysis and management program, which can be customized according to the customer's requirements to create a measurement plan.

• High-resolution reflection measurement system for 350-950nm

• Measurable film thickness: 1um - 100um

• Two-axis motorized stage with motion compensation, X120mm, Y120mm, accuracy 1um or optionally X1000mm, Y1000mm, accuracy 5um.

• Supports mapping scanning, capable of imaging and performing gradient imaging of the film thickness within the area.

• The scanning time for 100mm * 100mm is 4 minutes in total.

• Supports SDK and is easy to integrate into your system.

Data acquisition control software

Spectrum Factory is a professional spectral processing software.

Software support

1、Transmission and reflection mode, the transmission and reflection rate of glass or transparent objects

2、Raman mode, which can be combined with a laser to measure Raman spectra.

3、 Concentration mode, which can be combined with xenon lamps, measures the absorbance at ultraviolet wavelengths, thereby determining the liquid concentration according to Lambert-Beer's Law.

4、Fully automatic motor platform control, supporting single-axis motor, dual-axis motor, three-axis motor, microscope motor, auto-focusing, and camera support. The head supports score display and motion control, such as arc collection and S-shaped acceleration and deceleration.

5、 X-axis timing measurement mode, which can be used in conjunction with mercury-argon lamps to test the stability of the X-axis.

6、Y-axis time sequence measurement mode, which can be combined with the laser to test the stability of the laser's central wavelength.

7、Microscopic mode, which can be combined with the motorized stage, is capable of capturing hyperspectral images, supporting both transmission and reflection hyperspectral imaging, as well as Raman hyperspectral imaging.

8、 LIBS mode can be combined with a 1064 Nd-YAG laser to measure the composition of metals.

9、 Film thickness measurement, capable of measuring the thickness of films ranging from 5um to 100um.

10、Spectrophotometric color measurement can be used to measure parameters such as XYZ, Lab, Yxy, HSV, LCH, and RGB.

11、Online measurement, allowing remote control of the spectrometer's measurement data.

12、Uniformity measurement can test the distribution uniformity of samples, including the uniformity of drug particles or the uniformity of LED light.

Superior stability

As an industrial-grade spectrometer, stability is the most important technical indicator. The overall stability of the instrument is composed of the stability of the spectrometer and the stability of the light source.

Spectral instrument stability

The intensity stability of the spectrometer is over 99.99%.

The wavelength accuracy of the spectrometer is ± 0. 5nm.

Wavelength temperature stability 

wavelength repeatability of the spectrometer.

The stability of halogen lamps is over 99.9%.

Stability test diagram of the complete machine

 It features excellent stability. After 15 minutes of preheating, the stability of the halogen lamp is over 99.9%, and the overall stability of the machine is greater than 99% (as measured over 8 hours).

Motorized platform

1. Equipped with a two-axis automatic platform, the travel distance is  X120mm,Y120mm.

2. The travel distance can be customized, with a maximum of X  1000mmandY1000mm.

3. The matching program can achieve mapping scanning.

4. The precision of the automatic platform is 2μm, there palatability is 5μm, and the spot size is 1mm.

Hyperspectral imaging

The fully automatic film thickness measurement platform, combined with software algorithms, achieves hyperspectral imaging. It measures the film thickness index of different areas on the measurement plane. The spectrum, in coordination with the motor algorithm, realizes mapping and generates hyperspectral images.

Principle of Film Thickness Measurement

The broadband light emitted from the light source travels through the optical fiber and passes through the sensor head to illuminate the target. A portion of the light is reflected at the surface, while the transmitted light is reflected from the back of the target and returns to the sensor head. The two reflected lights interfere at each wavelength, and the intensity of the interference light is determined by the distance from the reference surface to the target. When the distance is exactly an integer multiple of the wavelength, the interference light reaches its maximum value. The interference light is separated by the spectroscope according to

different wavelengths, and the spectral distribution of the light intensity can be obtained from the light-receiving waveform of the CCD. By performing FFT processing and other waveform analyses on the spectral distribution of the light intensity, the distance to the target can be calculated.

Case of Film Thickness Measurement

A case of thin film thickness measurement, using a 200-800nm xenon lamp for excitation, shows that the thickness of the film is 1.96 μ m.